发生器
UHV deposition system Ebeam-sputter

Name: UHV deposition system Ebeam-sputter
Brand: UHV deposition system
Price: 55000 EUR
Availability: InStock

起拍價不包含增值稅

€55,000

狀況

二手

位置

Budel

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机器数据

機器描述:: 发生器

製造商:: UHV deposition system

模型:: Ebeam-sputter

狀況:: 二手

价格和位置

起拍價不包含增值稅

€55,000

位置:: Albert Plesmanstraat 3, 6021 PR Budel, NL

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优惠详情

產品ID:: A16976251

最後更新:: 於 02.09.2024

描述

UHV deposition system (ebeam sputter)

UHV deposition system:

Was used for deposition Titanium - Gold (ebeam)
Ebeam deposition unit is removed
Cryopump and prepump is removed
Loadlock:
for samples round 75mm
Incl. sample heater
450l/s turbomolecular pump (Leybold)
Proceschamber:
Size: Width 680mm x Height 750mm x Depth 590mm
Incl. shielding
Double oring door (partially pumped)
Heaters
Basepressure low 10-7mbar, high 10-8mbar
Kdodpouhcn Nofx Af Aju
Electronics:
Baseline cabinet (e-beam unit removed)
Old PLC (for pump/vent)
Gas cabinet/water:
Various valves/flow reducers for gas and water

Note: D&M Vacuumsystems can upgrade the system to new processes (E-beam or Sputter) incl. new electronics and software.

EUR 55.000,-

廣告是自動翻譯的，翻譯中可能會出現一些錯誤。