Pfeiffer C590 PVD 蒸发溅射系统

Pfeiffer C590

Opportunity:

2x Pfeiffer Classic 590 available!

Price: EUR 99.500/piece.

Configuration Coater 1:


2x Pfeiffer TPH 2301 (2300ls) completely overhauled
Pfeiffer DCU 600
2x VAT Throttle Valve 64048-pe48-ads2/0001
1x Pfeiffer PKR251 fullrange sensor
Pfeiffer TPR280 for prevacuum
Pfeiffer DUO 120 prepump (120m3/h)
Vacuumchamber:
for substrate size round 840mm
incl shielding and spare shielding set
2x viewport
Several feedthroughs
Rotating feedthrough incl thermocouple
Infrared heater
Watermanifold plus valves
Vacuumvalves for venting-pumpdown etc

Notes: Currently used for Resistance Evaporation (no boats available)


Current PLC and E-cabinet is removed due to IP. However: if required our company Orange Thin Films can do a complete refurbishment with Labview automation and new processes (such as Eeam-Sputtering-Evaporation etc)




Configuration Coater 2:


2x Pfeiffer TPH 2201 s p c (horizontal turbo 2200ls) completely overhauled
Pfeiffer DCU 600
2x VAT Throttle Valve 64048-pe48-ads2/0001
1x Pfeiffer PKR251 fullrange sensor
Pfeiffer TPR280 for prevacuum
Pfeiffer DUO 120 prepump (120m3/h)
Vacuumchamber:
for substrate size round 840mm
incl shielding and spare shielding set
2x viewport
Several feedthroughs
Bcsdpfx Afehwv Tfs Sow
Rotating feedthrough incl thermocouple
Infrared heater
Watermanifold plus valves
Vacuumvalves for venting-pumpdown etc

Notes: Current used for Resistance Evaporation (no boats available)

Current PLC and E-cabinet is removed due to IP. However: if required our company Orange Thin Films can do a complete refurbishment with Labview automation and new processes (such as Eeam-Sputtering-Evaporation etc)