晶圆前端模块 300毫米

BROOKS ASYST Spartan EFEM Sorter

Brooks Automation Wafer Front-End Module, 300mm, ASYST Spartan EFEM, Sorter

Model: ASYST Spartan EFEM
Type: Sorter
Condition: Used

Technical Data:
100-240V AC
50/60Hz
10A

General:
300-mm EFEM with 3 load ports, cleanroom mini-environment, and integrated wafer transfer robot

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This unit is an Equipment Front End Module (EFEM) from the ASYST Spartan series, designed for fully automated handling of 300 mm silicon wafers in semiconductor manufacturing.
It features three load ports, a mini-environment with ULPA air filters, internal lighting, comprehensive safety controls, and all necessary interfaces for seamless integration into production lines.
In addition, it comes with a fully integrated wafer transfer robot that extracts wafers from FOUP/carrier load ports, separates them, and precisely delivers them to downstream process modules.

Year of manufacture: 27.12.2010
Including CD with operating, service, and installation manuals (9701-3060-01 Rev G)

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