芯片湿法处理设备
Robotechnik Europe OPTIwet ST30

Name: Robotechnik Europe OPTIwet ST30
Brand: Robotechnik Europe
Availability: InStock

状况

二手

位置

德国

芯片湿法处理设备 Robotechnik Europe OPTIwet ST30

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机器数据

机器名称:: 芯片湿法处理设备

制造商:: Robotechnik Europe

型号:: OPTIwet ST30

状况:: 可投入使用（二手）

价格和位置

位置:: Deutschland

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优惠详情

广告编号:: A20618495

参考编号:: INNO30389

更新:: 最近更新时间为 26.11.2025

描述

System for wet chemical processing of wafers up to 12in, substrates up to X/Y 9in/9in, stand-alone housing, process modules, PP process chamber, 2 programmable media arms, rotational speed 1-4000rpm, acceleration ramp 1-3000rpm, spin time 1-999s, exhaust process bowl 2x DN110, chamber 2x DN110, housing 1x DN110, control 1x DN110 (each approx. 200m³/h), CDA 8+/-2bar, vacuum -0.8+/-0.2bar, nitrogen 4.0+/-0.5bar, 3 media drains, waste box for 2 concentrate wastes, reagent box with pressure vessel, 4 Julabo thermostat baths. The system was dismantled during disassembly. Viewing possible by arrangement.
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