卷对卷溅射

Bobst Group SA Roll-To-Roll Sputtering

GVE/Optilab sputtering system: Roll-to-roll system for the deposition of ultra-thin films (in the nanometer range). The system can deposit different materials (metals, transparent conductive layers) onto film material. It is equipped with multiple sputtering cathodes, meaning several thin layers can be deposited simultaneously.

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GVE, Bobst Ltd, Optilab, 2010, Vacuum roll-to-roll sputtering tool with 3 deposition chambers for 2 cathodes each; Complete with: - 520mm web width, bi-directional winding with interleave and de-interleave facility. Turbo molecular pumping (mag lev) in all zones. Drum chiller, reheat unit (-20 to +200°C). 1100 polycold unit with cryo coils in each sputter zone as well as in the winding zone. A GVE AC medium frequency plasma unit. A post coating resistance monitoring system. (Measuring resistance on the center line of the web). One Siemens WIN CC touch screen system for controlling the M/C and monitoring system. I/R heating zone (3 heating units). Web biasing system (PSU etc). 1 gen mag c/w 2 x 20 kw pulsed dc. 1 dual mag c/w 2 x 10 kw pulsed dc (c/w hidden anode). MFC’s etc. 1 x fully integrated PEM sputter control system. Original price Euro 1,450,000.-

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