台式石英管炉

ATV Techologie GmbH PEO 601

ATV Technologie GmbH Tabletop Quartz Tube Furnace, PEO 601

Model: PEO601
Condition: Used

Technical Data:
230/400V AC
50Hz
16A
6.3kW
20-1000°C

General Information:
Year of manufacture: 2007
Serial number: 172
Operating hours: 6,383

Compact tabletop unit for Plasma Electrolytic Oxidation (PEO) or Micro Arc Oxidation (MAO)
Equipment for firing or annealing electronic components
Designed for surface treatment processes of aluminum, magnesium, and titanium
Produces ceramic coatings on metal surfaces that are particularly hard, corrosion-resistant, and temperature-resistant
Programmable firing furnace with precise temperature control
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Maximum temperature range: up to approx. 1,000°C
Heating rate: approx. 100°C/min
Processing chamber: diameter approx. 112 mm (4½″), suitable for wafers up to 100 mm
Application in semiconductor, micro, and nanosystem technology
Ideal for research, development, and small series production
Microprocessor-based control with adjustable parameters (e.g., voltage, current, time)
Integrated control panel with digital displays
RS-232 interface for process data monitoring and control
Optional connection for process gases (e.g., N₂, H₂)

Accessories:
Scope of delivery as shown in the photos

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